HYCOAT

As the first European Training Network at the intersection of chemistry, physics, materials science and engineering dealing with the synthesis and applications of hybrid coatings grown by Molecular Layer Deposition (MLD), HYCOAT aimed to create a group of exceptionally well-trained young researchers who have a deep understanding of all aspects of MLD technology, as well as broad vision on the application potential of hybrid coatings.

Beneficiaries: University of Helsinki (Prof. Markku Leskelä, Prof. Mikko Ritala), Ruhr University Bochum (Prof. Anjana Devi), KU Leuven (Prof. Rob Ameloot, Prof. Philippe Vereecken), Ghent University (Prof. Jolien Dendooven, Prof. Christophe Detavernier), Tyndall (Prof. Michael Nolan), TNO (Prof. Paul Poodt), CIC nanoGune (Prof. Mato Knez), University of Oslo (Prof. Ola Nilsen), Aalto University (Prof. Maarit Karppinen), imec (Prof. Philippe Vereecken).

Early Stage Researchers (ESRs): Saba Ghafourisaleh, Parmish Kaur, Dmitry Kravchenko, Juan Santo Domingo Penaranda, Arbresha Muriqi, Nithin Poonkottil, Jain Hardik, Oksana Yurkevich, Karina Ashurbekova, Srinath Murali, Melania Rogowska, Xinzhi Li, Ramin Ghiyasi, Andrea Itziar Pitillas Martinez, Sameer Rodriques.

HYCOAT Publications

Call	H2020-MSCA-ITN-2017
Type of action	Marie Skłodowska-Curie Innovative Training Networks – European Training Networks (MSCA-ITN-ETN)
Acronym	HYCOAT
Grant Agreement number	765378
Duration	48 months
Start date	February 1, 2018
EU Contribution	€ 3,900,000.00
Project Coordinator	Christophe Detavernier (Ghent University)

2025

Growing Hybrid Cuticles: Metallochitins as an Emerging Family of Bioactive Mimics of Chitin

Ashurbekova K; Alonso-Lerma B; Ashurbekova K; Muriqi A; Barandiaran L; Jankovic IS; Modin E; Santos JI; Perez-Jimenez R; Perez-Jimenez R; Petravic M; Nolan M; Knez M

ACS Applied Materials & Interfaces, Vol. 17, Issue 6, pp. 10118–10128.
DOI: 10.1021/acsami.4c19728

Vapour phase deposition of phosphonate-containing alumina thin films using dimethyl vinylphosphonate as precursor

Peñaranda, JS; Dhara, A; Chalishazar, A; Minjauw, MM; Dendooven, J; Detavernier, C

Dalton Transactions, Vol. 54, Issue 6, pp. 2634-2644.
DOI: 10.1039/d4dt02851a

2024

Targeting Manganese Amidinate and ß-Ketoiminate Complexes as Precursors for Mn-Based Thin Film Deposition

Wilken, M; Muriqi, A; Krusenbaum, A; Nolan, M; Devi, A

Chemistry-A European Journal, Vol. 30, Issue 45, e202401275.
DOI: 10.1002/chem.202401275

Deactivation of Partially Charged LNMO in Contact with Water by Electrochemical Protonation of Li_(1-x)Ni_0.5Mn_1.5O₄

Pitillas, AI; De Taeye, LL; Vereecken, PM

Advanced Materials Interfaces, Vol. 11, Issue 16.
DOI: 10.1002/admi.202400003

2023

Introducing a Robust Flexible Conductive Hybrid: Indium Oxide-ParyleneC Obtained by Vapor Phase Infiltration

Yurkevich, O; Modin, E; Jankovic, IS; Peter, R; Petravic, M; Knez, M

Chemistry of Materials, Vol. 35, Issue 18, pp. 7529-7541.
DOI: 10.1021/acs.chemmater.3c01115

Depositing ALD-oxides on MLD-metalcones: enhancing initial growth through O₂ plasma densification

Peñaranda, JS; Minjauw, MM; Vandenbroucke, SST; Petit, R; Li, J; Dendooven, J; Detavernier, C

Dalton Transactions, Vol. 52, Issue 21, pp. 7219-7224.
DOI: 10.1039/d3dt00378g

Low Temperature Area Selective Atomic Layer Deposition of Ruthenium Dioxide Thin Films Using Polymers as Inhibition Layers

Poonkottil, N; Rijckaert, H; Rajendran, K; Petit, RR; Martin, LIDJ; Van Thourhout, D; Van Driessche, I; Detavernier, C; Dendooven, J

Advanced Materials Interfaces, Vol. 10, Issue 9.
DOI: 10.1002/admi.202201934

Molecular Layer Deposition of Zeolitic Imidazolate Framework-8 Films

Smets, J; Cruz, AJ; Rubio-Gimenez, V; Tietze, ML; Kravchenko, DE; Arnauts, G; Matavz, A; Wauteraerts, N; Tu, M; Marcoen, K; Imaz, I; Maspoch, D; Korytov, M; Vereecken, PM; De Feyter, S; Hauffman, T; Ameloot, R

Chemistry of Materials
DOI: 10.1021/acs.chemmater.2c03439

Molecular Layer Deposition of Pyrrone Thin Films by Oxidative Polymerization

Ghafourisaleh, S; Vehkamäki, M; Vihervaara, A; Zhang, C; Heikkilä, M; Leskelä, M; Putkonen, M; Ritala, M

Advanced Materials Interfaces, Vol. 10, Issue 7.
DOI: 10.1002/admi.202202174

Nanoporous Metal-Organic Framework Thin Films Prepared Directly from Gaseous Precursors by Atomic and Molecular Layer Deposition: Implications for Microelectronics

Multia, J; Kravchenko, DE; Rubio-Giménez, V; Philip, A; Karppinen, M; Ameloot, R

ACS Applied Nano Materials
DOI: 10.1021/acsanm.2c04934

Molecular layer deposition of alucone in high aspect ratio trenches: The effect of TMA outgassing on step-coverage

Jain, H; Creatore, M; Poodt, P

Journal of Vacuum Science & Technology A, Vol. 41, Issue 1, 012401.
DOI: 10.1116/6.0002249

2022

Spatially Templated Nanolines of Ru and RuO₂ by Sequential Infiltration Synthesis

Poonkottil, N; Solano, E; Muriqi, A; Minjauw, MM; Filez, M; Nolan, M; Detavernier, C; Dendooven, J

Chemistry of Materials, Vol. 34, Issue 23, pp. 10347-10360.
DOI: 10.1021/acs.chemmater.2c01866

Vapor-Assisted Powder Synthesis and Oriented MOF-CVD Thin Films of the Metal-Organic Framework HKUST-1

Rodríguez-Hermida, S; Kravchenko, DE; Wauteraerts, N; Ameloot, R

Inorganic Chemistry
DOI: 10.1021/acs.inorgchem.2c02490

Role of titanium and organic precursors in molecular layer deposition of titanicone hybrid materials

Muriqi, A; Nolan, M

Beilstein Journal of Nanotechnology, Vol. 13, pp.1240-1255.
DOI: 10.3762/bjnano.13.103

Atomic Layer Deposition of Ruthenium Dioxide Based on Redox Reactions between Alcohols and Ruthenium Tetroxide

Poonkottil, N; Minjauw, MM; Werbrouck, A; Checchia, S; Solano, E; Nisula, M; Franquet, A; Detavernier, C; Dendooven, J

Chemistry of Materials, Vol. 34, Issue 19, pp. 8946-8958.
DOI: 10.1021/acs.chemmater.2c02292

SnO deposition via water based ALD employing tin formamidinate: precursor characterization and process development

Huster, N; Ghiyasi, R; Zanders, D; Rogalla, D; Karppinen, M; Devi, A

Dalton Transactions, Vol. 51, Issue 39, pp. 14970-14979.
DOI: 10.1039/d2dt02562k

Aerosol Jet Printing of the Ultramicroporous Calcium Squarate Metal-Organic Framework

Kravchenko, DE; Matavz, A; Rubio-Gimenez, V; Vanduffel, H; Verstreken, M; Ameloot, R

Chemistry of Materials, Vol. 34, Issue 15, pp. 6809-6814.
DOI: 10.1021/acs.chemmater.2c00947

Entropy-Driven Self-Healing of Metal Oxides Assisted by Polymer-Inorganic Hybrid Materials

Yurkevich, O; Modin, E; Saric, I; Petravic, M; Knez, M

Advanced Materials, Vol. 34, Issue 30, 2202989.
DOI: 10.1002/adma.202202989

Photoactive Zr-aromatic hybrid thin films made by molecular layer deposition

Rogowska, M; Bruzell, E; Valen, H; Nilsen, O

RSC Advances, Vol. 12, Issue 25, pp. 15718-15727.
DOI: 10.1039/d2ra02004a

Atomic Layer Deposition of Intermetallic Fe₄Zn₉ Thin Films from Diethyl Zinc

Ghiyasi, R; Philip, A; Liu, J; Julin, J; Sajavaara, T; Nolan, M; Karppinen, M

Chemistry of Materials
DOI: 10.1021/acs.chemmater.2c00907

Spatial atmospheric pressure molecular layer deposition of alucone films using dimethylaluminum isopropoxide as the precursor

Jain, H; Creatore, M; Poodt, P

Dalton Transactions, Vol. 51, Issue 20, pp. 7918-7927.
DOI: 10.1039/d2dt00570k

Molecular Layer Deposition of Thermally Stable Polybenzimidazole-Like Thin Films and Nanostructures

Ghafourisaleh, S; Hatanpää, T; Vihervaara, A; Mizohata, K; Vehkamäki, M; Leskelä, M; Putkonen, M; Ritala, M

Advanced Materials Interfaces, Vol. 9, Issue 15, 2200370.
DOI: 10.1002/admi.202200370

Atomic/molecular layer deposition of cerium hybrid thin films using rigid organic precursors

Kaur, P; Muriqi, A; Wree, JL; Ghiyasi, R; Safdar, M; Nolan, M; Karppinen, M; Devi, A

Dalton Transactions, Vol. 51, Issue 14, pp. 5603-5611.
DOI: 10.1039/d2dt00353h

Biocompatible Silicon-Based Hybrid Nanolayers for Functionalization of Complex Surface Morphologies

Ashurbekova, K; Ashurbekova, K; Alonso-Lerma, B; Saric, I; Barandiaran, L; Modin, E; Petravic, M; Perez-Jimenez, R; Knez, M

ACS Applied Nano Materials, Vol. 5, Issue 2.
DOI: 10.1021/acsanm.1c04428

Simultaneously enhanced electrical conductivity and suppressed thermal conductivity for ALD ZnO films via purge-time controlled defects

Ghiyasi, R; Milich, M; Tomko, J; Tewari, GC; Lastusaari, M; Hopkins, PE; Karppinen, M

Applied Physics Letters, Vol. 120, Issue 6, 062106.
DOI: 10.1063/5.0081657

Selective Vapor-Phase Doping of Pt Nanoparticles into Phase-Controlled Nanoalloys

Poonkottil, N; Ramachandran, RK; Solano, E; Srinath, NV; Feng, JY; Werbrouck, A; Van Daele, M; Filez, M; Minjauw, MM; Poelman, H; Coati, A; Detavernier, C; Dendooven, J

Journal of Physical Chemistry C, Vol. 126, Issue 3, pp.1426-1438.
DOI: 10.1021/acs.jpcc.1c10143

Ferromagnetic Europium Sulfide Thin Films: Influence of Precursors on Magneto-Optical Properties

Beer, SMJ; Muriqi, A; Lindner, P; Winter, M; Rogalla, D; Nolan, M; Ney, A; Debus, J; Devi, A

Chemistry of Materials, Vol. 34, Issue 1, pp. 152-164.
DOI: 10.1021/acs.chemmater.1c02958

2021

Role of terminal groups in aromatic molecules on the growth of Al₂O₃-based hybrid materials

Muriqi, A; Karppinen, M; Nolan, M

Dalton Transactions, Vol. 50, Issue 47, pp. 17583-17593.
DOI: 10.1039/d1dt03195c

Molecular layer deposition of photoactive metal-naphthalene hybrid thin films

Rogowska, M; Hansen, PA; Sonsteby, HH; Dziadkowiec, J; Valen, H; Nilsen, O

Dalton Transactions, Vol. 50, Issue 37, pp. 12896-12905.
DOI: 10.1039/d1dt02201f

A study on the influence of ligand variation on formamidinate complexes of yttrium: new precursors for atomic layer deposition of yttrium oxide

Beer, SMJ; Boysen, N; Muriqi, A; Zanders, D; Berning, T; Rogalla, D; Bock, C; Nolan, M; Devi, A

Dalton Transactions, Vol. 50, Issue 37, pp. 12944-12956.
DOI: 10.1039/d1dt01634b

Oxidative MLD of Conductive PEDOT Thin Films with EDOT and ReCl₅ as Precursors

Ghafourisaleh, S; Popov, G; Leskelä, M; Putkonen, M; Ritala, M

ACS Omega, Vol. 6, Issue 27, pp. 17545-17554.
DOI: 10.1021/acsomega.1c02029

Photoactive Thin-Film Structures of Curcumin, TiO₂ and ZnO

Philip, A; Ghiyasi, R; Karppinen, M

Molecules, Vol. 26, Issue 11, 3214.
DOI: 10.3390/molecules26113214

Organic-component dependent thermal conductivity reduction in ALD/MLD grown ZnO:organic superlattice thin films

Ghiyasi, R; Milich, M; Tomko, J; Hopkins, PE; Karppinen, M

Applied Physics Letters, Vol. 118, Issue 21, 211903.
DOI: 10.1063/5.0052450

Effect of different oxide and hybrid precursors on MOF-CVD of ZIF-8 films

Cruz, AJ; Arnauts, G; Obst, M; Kravchenko, DE; Vereecken, PM; De Feyter, S; Stassen, I; Hauffman, T; Ameloot, R

Dalton Transactions, Vol. 50, Issue 20, pp. 6784-6788.
DOI: 10.1039/d1dt00927c

About the importance of purge time in molecular layer deposition of alucone films

Jain, H; Poodt, P

Dalton Transactions, Vol. 50, Issue 17, pp. 5807-5818.
DOI: 10.1039/d1dt00623a

Atomic Layer Deposition of Insulating AlF₃/Polyimide Nanolaminate Films

Li, XZ; Vehkamäki, M; Heikkilä, M; Mattinen, M; Putkonen, M; Leskelä, M; Ritala, M

Coatings, Vol. 11, Issue 3, 355.
DOI: 10.3390/coatings11030355

Radical-triggered cross-linking for molecular layer deposition of SiAlCOH hybrid thin films

Ashurbekova, K; Ashurbekova, K; Saric, I; Modin, E; Petravic, M; Abdulagatov, I; Abdulagatov, A; Knez, M

Chemical Communications, Vol. 57, Issue 17, pp. 2160-2163.
DOI: 10.1039/d0cc07858a

Template-Mediated Control over Polymorphism in the Vapor-Assisted Formation of Zeolitic Imidazolate Framework Powders and Films

Tu, M; Kravchenko, DE; Xia, BZ; Rubio-Giménez, V; Wauteraerts, N; Verbeke, R; Vankelecom, IFJ; Stassin, T; Egger, W; Dickmann, M; Amenitsch, H; Ameloot, R

Angewandte Chemie-International Edition, Vol. 60, Issue 14, pp. 7553-7558.
DOI: 10.1002/anie.202014791

Converting molecular layer deposited alucone films into Al₂O₃/alucone hybrid multilayers by plasma densification

Peñaranda, JS; Nisula, M; Vandenbroucke, SST; Minjauw, MM; Li, J; Werbrouck, A; Keukelier, J; Martínez, API; Dendooven, J; Detavernier, C

Dalton Transactions, Vol. 50, Issue 4.
DOI: 10.1039/d0dt03896b

Visible-Light Absorbing TiO₂ : Curcumin Thin Films with ALD/MLD

Philip, A; Ghiyasi, R; Karppinen, M

CHEMNANOMAT, Vol. 7, Issue 3, pp. 253-256.
DOI: 10.1002/cnma.202000638

Ultrathin Hybrid SiAlCOH Dielectric Films through Ring-Opening Molecular Layer Deposition of Cyclic Tetrasiloxane

Ashurbekova, K; Ashurbekova, K; Saric, I; Gobbi, M; Modin, E; Chuvilin, A; Petravic, M; Abdulagatov, I; Knez, M

Chemistry of Materials, Vol. 33, Issue 3, pp. 1022-1030.
DOI: 10.1021/acs.chemmater.0c04408

Rational Development of Guanidinate and Amidinate Based Cerium and Ytterbium Complexes as Atomic Layer Deposition Precursors: Synthesis, Modeling, and Application

Kaur, P; Mai, LK; Muriqi, A; Zanders, D; Ghiyasi, R; Safdar, M; Boysen, N; Winter, M; Nolan, M; Karppinen, M; Devi, A

Chemistry-A European Journal, Vol. 27, Issue 15, pp. 4913-4926.
DOI: 10.1002/chem.202003907

Direct X-ray and electron-beam lithography of halogenated zeolitic imidazolate frameworks

Tu, M; Xia, BZ; Kravchenko, DE; Tietze, ML; Cruz, AJ; Stassen, I; Hauffman, T; Teyssandier, J; De Feyter, S; Wang, Z; Fischer, RA; Marmiroli, B; Amenitsch, H; Torvisco, A; Velásquez-Hernández, MD; Falcaro, P; Ameloot, R

Nature Materials, Vol. 20, Issue 1, pp. 93-99.
DOI: 10.1038/s41563-020-00827-x

2020

Templated Solvent-Free Powder Synthesis and MOF-CVD Films of the Ultramicroporous Metal-Organic Framework α-Magnesium Formate

Kravchenko, DE; Cruz, AJ; Rodríguez-Hermida, S; Wauteraerts, N; Hauffman, T; Ameloot, R

Chemistry of Materials, Vol. 32, Issue 24, pp. 10469-10475.
DOI: 10.1021/acs.chemmater.0c03212

A carbene stabilized precursor for the spatial atomic layer deposition of copper thin films

Boysen, N; Misimi, B; Muriqi, A; Wree, JL; Hasselmann, T; Rogalla, D; Haeger, T; Theirich, D; Nolan, M; Riedl, T; Devi, A

Chemical Communications, Vol. 56, Issue 89, pp. 13752-13755.
DOI: 10.1039/d0cc05781a

Vapor phase processing: a novel approach for fabricating functional hybrid materials

Ashurbekova, K; Ashurbekova, K; Botta, G; Yurkevich, O; Knez, M

Nanotechnology, Vol. 31, Issue 34, 342001.
DOI: 10.1088/1361-6528/ab8edb

Molecular layer deposition of hybrid siloxane thin films by ring opening of cyclic trisiloxane and azasilane

Ashurbekova, K; Ashurbekova, K; Saric, I; Modin, E; Petravic, M; Abdulagatov, I; Abdulagatov, A; Knez, M

Chemical Communications, Vol. 56, Issue 62, pp. 8778-8781.
DOI: 10.1039/d0cc04195e

First principles study of reactions in alucone growth: the role of the organic precursor

Muriqi, A; Nolan, M

Dalton Transactions, Vol. 49, Issue 25, pp. 8710-8721.
DOI: 10.1039/d0dt01376e

Organic-Component Dependent Crystal Orientation and Electrical Transport Properties in ALD/MLD Grown ZnO-Organic Superlattices

Ghiyasi, R; Tewari, GC; Karppinen, M

Journal of Physical Chemistry C, Vol. 124, Issue 25, pp. 13765-13770.
DOI: 10.1021/acs.jpcc.0c03053

Molecular Layer Deposition of "Magnesicone", a Magnesium-based Hybrid Material

Kint, J; Mattelaer, F; Vandenbroucke, SST; Muriqi, A; Minjauw, MM; Nisula, M; Vereecken, PM; Nolan, M; Dendooven, J; Detavernier, C

Chemistry of Materials, Vol. 32, Issue 11, pp. 4451-4466.
DOI: 10.1021/acs.chemmater.9b05116

A European Training Network for Functional Hybrid Coatings by Molecular Layer Deposition

HYCOAT Publications

2025

Growing Hybrid Cuticles: Metallochitins as an Emerging Family of Bioactive Mimics of Chitin

Vapour phase deposition of phosphonate-containing alumina thin films using dimethyl vinylphosphonate as precursor

2024

Targeting Manganese Amidinate and ß-Ketoiminate Complexes as Precursors for Mn-Based Thin Film Deposition

Deactivation of Partially Charged LNMO in Contact with Water by Electrochemical Protonation of Li(1-x)Ni0.5Mn1.5O4

2023

Introducing a Robust Flexible Conductive Hybrid: Indium Oxide-ParyleneC Obtained by Vapor Phase Infiltration

Depositing ALD-oxides on MLD-metalcones: enhancing initial growth through O2 plasma densification

Low Temperature Area Selective Atomic Layer Deposition of Ruthenium Dioxide Thin Films Using Polymers as Inhibition Layers

Molecular Layer Deposition of Zeolitic Imidazolate Framework-8 Films

Molecular Layer Deposition of Pyrrone Thin Films by Oxidative Polymerization

Nanoporous Metal-Organic Framework Thin Films Prepared Directly from Gaseous Precursors by Atomic and Molecular Layer Deposition: Implications for Microelectronics

Molecular layer deposition of alucone in high aspect ratio trenches: The effect of TMA outgassing on step-coverage

2022

Spatially Templated Nanolines of Ru and RuO2 by Sequential Infiltration Synthesis

Vapor-Assisted Powder Synthesis and Oriented MOF-CVD Thin Films of the Metal-Organic Framework HKUST-1

Role of titanium and organic precursors in molecular layer deposition of titanicone hybrid materials

Atomic Layer Deposition of Ruthenium Dioxide Based on Redox Reactions between Alcohols and Ruthenium Tetroxide

SnO deposition via water based ALD employing tin formamidinate: precursor characterization and process development

Aerosol Jet Printing of the Ultramicroporous Calcium Squarate Metal-Organic Framework

Entropy-Driven Self-Healing of Metal Oxides Assisted by Polymer-Inorganic Hybrid Materials

Photoactive Zr-aromatic hybrid thin films made by molecular layer deposition

Atomic Layer Deposition of Intermetallic Fe4Zn9 Thin Films from Diethyl Zinc

Spatial atmospheric pressure molecular layer deposition of alucone films using dimethylaluminum isopropoxide as the precursor

Molecular Layer Deposition of Thermally Stable Polybenzimidazole-Like Thin Films and Nanostructures

Atomic/molecular layer deposition of cerium hybrid thin films using rigid organic precursors

Biocompatible Silicon-Based Hybrid Nanolayers for Functionalization of Complex Surface Morphologies

Simultaneously enhanced electrical conductivity and suppressed thermal conductivity for ALD ZnO films via purge-time controlled defects

Selective Vapor-Phase Doping of Pt Nanoparticles into Phase-Controlled Nanoalloys

Ferromagnetic Europium Sulfide Thin Films: Influence of Precursors on Magneto-Optical Properties

2021

Role of terminal groups in aromatic molecules on the growth of Al2O3-based hybrid materials

Molecular layer deposition of photoactive metal-naphthalene hybrid thin films

A study on the influence of ligand variation on formamidinate complexes of yttrium: new precursors for atomic layer deposition of yttrium oxide

Oxidative MLD of Conductive PEDOT Thin Films with EDOT and ReCl5 as Precursors

Photoactive Thin-Film Structures of Curcumin, TiO2 and ZnO

Organic-component dependent thermal conductivity reduction in ALD/MLD grown ZnO:organic superlattice thin films

Effect of different oxide and hybrid precursors on MOF-CVD of ZIF-8 films

About the importance of purge time in molecular layer deposition of alucone films

Atomic Layer Deposition of Insulating AlF3/Polyimide Nanolaminate Films

Radical-triggered cross-linking for molecular layer deposition of SiAlCOH hybrid thin films

Template-Mediated Control over Polymorphism in the Vapor-Assisted Formation of Zeolitic Imidazolate Framework Powders and Films

Converting molecular layer deposited alucone films into Al2O3/alucone hybrid multilayers by plasma densification

Visible-Light Absorbing TiO2 : Curcumin Thin Films with ALD/MLD

Ultrathin Hybrid SiAlCOH Dielectric Films through Ring-Opening Molecular Layer Deposition of Cyclic Tetrasiloxane

Rational Development of Guanidinate and Amidinate Based Cerium and Ytterbium Complexes as Atomic Layer Deposition Precursors: Synthesis, Modeling, and Application

Direct X-ray and electron-beam lithography of halogenated zeolitic imidazolate frameworks

2020

Templated Solvent-Free Powder Synthesis and MOF-CVD Films of the Ultramicroporous Metal-Organic Framework α-Magnesium Formate

A carbene stabilized precursor for the spatial atomic layer deposition of copper thin films

Vapor phase processing: a novel approach for fabricating functional hybrid materials

Molecular layer deposition of hybrid siloxane thin films by ring opening of cyclic trisiloxane and azasilane

First principles study of reactions in alucone growth: the role of the organic precursor

Organic-Component Dependent Crystal Orientation and Electrical Transport Properties in ALD/MLD Grown ZnO-Organic Superlattices

Molecular Layer Deposition of "Magnesicone", a Magnesium-based Hybrid Material

Deactivation of Partially Charged LNMO in Contact with Water by Electrochemical Protonation of Li_(1-x)Ni_0.5Mn_1.5O₄

Depositing ALD-oxides on MLD-metalcones: enhancing initial growth through O₂ plasma densification

Spatially Templated Nanolines of Ru and RuO₂ by Sequential Infiltration Synthesis

Atomic Layer Deposition of Intermetallic Fe₄Zn₉ Thin Films from Diethyl Zinc

Role of terminal groups in aromatic molecules on the growth of Al₂O₃-based hybrid materials

Oxidative MLD of Conductive PEDOT Thin Films with EDOT and ReCl₅ as Precursors

Photoactive Thin-Film Structures of Curcumin, TiO₂ and ZnO

Atomic Layer Deposition of Insulating AlF₃/Polyimide Nanolaminate Films

Converting molecular layer deposited alucone films into Al₂O₃/alucone hybrid multilayers by plasma densification

Visible-Light Absorbing TiO₂ : Curcumin Thin Films with ALD/MLD